Modeling and FEM Simulations of MEMS Devices

Kursziele

At the end of the course participants will be able to:

  • Understand the principles of finite elements simulation (FEM) of a variety of MEMS devices, its applications and the different types of useful studies. 
  • Learn the methodology and workflow for finite elements simulation with the help of  powerful commercial software, widely used in academic and industrial environments.
  • Perform advanced analysis of MEMS systems involving the interplay of different physical phenomena (multiphysics simulations).

The concepts addressed in the lecture will be illustrated in the form of live demos.

All participants will receive the course supporting material and a CD-ROM with the models and the examples presented. The participants will also receive a two-week time-limited version of the software used during the course.

Participants should bring their own laptops for the exercise session (the room is not equipped with computers).

Zielpublikum

The course is addressed to scientists and engineers with a physics or micro-technical background and familiarity with the concepts of MEMS devices.

Inhalt

Fundamental concepts

Introduction to the theory of structural mechanics and electromagnetics

Special considerations at the micro-scale

Fundamentals of FEM for MEMS simulations

  1. Discretization
  2. Concept of moving mesh
  3. Equation Solvers
 

Applications - Part I:

  1. Cantilever beams
  2. Electrostatic actuation
  3. Piezoelectricity
  4. Surface Acoustic Wave (SAW) devices

 

 --- Lunch break ---

 

Advanced topics

Applications - Part II:

  • Thermal actuators
  • Joule Heating
  • Thermoelectric effect

 

Live Demos

  • Sensors
  • Actuators
  • Hints on different Study types

Exercise session using the software COMSOL Multiphysics

Closing remarks / Course End

 

Informationen und Anmeldung

Z. Zt. keine Kurstermine. Bei Interesse kontaktieren Sie uns bitte..
Ab 5 Interessenten kontaktieren wir Sie, um einen Termin zu finden, der Ihnen zusagt.

Dauer

1 day

Kosten

890.00

Kurssprache

Englisch

Kursleiter

Seite drucken

Informationen und Anmeldung

Z. Zt. keine Kurstermine. Bei Interesse kontaktieren Sie uns bitte..
Ab 5 Interessenten kontaktieren wir Sie, um einen Termin zu finden, der Ihnen zusagt.

Kurssprache

Englisch

Kursleiter

Seite drucken