Principles, methodology and workflow of finite elements simulation (FEM) of a variety of MEMS devices, applications and different types of useful studies. Utilisation of a commercial software, widely used in academic and industrial environment.

At the end of the course participants will be able to:

• Understand the principles of finite elements simulation (FEM) of a variety of MEMS devices, its applications and the different types of useful studies. 
• Learn the methodology and workflow for finite elements simulation with the help of  powerful commercial software, widely used in academic and industrial environments.
• Perform advanced analysis of MEMS systems involving the interplay of different physical phenomena (multiphysics simulations).

The concepts addressed in the lecture will be illustrated in the form of live demos.

All participants will receive the course supporting material and a CD-ROM with the models and the examples presented. The participants will also receive a two-week time-limited version of the software used during the course.

Participants should bring their own laptops for the exercise session (the room is not equipped with computers).

The course is addressed to scientists and engineers with a physics or micro-technical background and familiarity with the concepts of MEMS devices.

Fundamental concepts

Introduction to the theory of structural mechanics and electromagnetics

Special considerations at the micro-scale

Fundamentals of FEM for MEMS simulations

1. Discretization
2. Concept of moving mesh
3. Equation Solvers

Applications - Part I:

1. Cantilever beams
2. Electrostatic actuation
3. Piezoelectricity
4. Surface Acoustic Wave (SAW) devices

 --- Lunch break ---

Advanced topics

Applications - Part II:

• Thermal actuators
• Joule Heating
• Thermoelectric effect

Live Demos

• Sensors
• Actuators
• Hints on different Study types

Exercise session using the software COMSOL Multiphysics

Closing remarks / Course End