Principles, methodology and workflow of finite elements simulation (FEM) of a variety of MEMS devices, applications and different types of useful studies. Utilisation of a commercial software, widely used in academic and industrial environment.
At the end of the course participants will be able to:
The concepts addressed in the lecture will be illustrated in the form of live demos.
All participants will receive the course supporting material and a CD-ROM with the models and the examples presented. The participants will also receive a two-week time-limited version of the software used during the course.
Participants should bring their own laptops for the exercise session (the room is not equipped with computers).
The course is addressed to scientists and engineers with a physics or micro-technical background and familiarity with the concepts of MEMS devices.
Introduction to the theory of structural mechanics and electromagnetics
Special considerations at the micro-scale
Fundamentals of FEM for MEMS simulations
Applications - Part I:
--- Lunch break ---
Applications - Part II:
Exercise session using the software COMSOL Multiphysics
Closing remarks / Course End
This course is currently not scheduled. Please contact us in case of interest.
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