Ivo Rangelow

Prof Dr Ivo Rangelow is Director of the Institute for Micro- and Nanoelectronics, MNES at the Technical University of Ilmenaul, Germany. Main activities: Management of micro and nanostructuring branch. Principal scientist on projects in the area of nanostructuring, M(N)EMS, proximal nano-probes, nano lithography, semiconductor analysis, vacuum microelectronics, solid-gas phase reactions, semiconductor nanodevices, sensors/actuators and embedded systems. Responsibilities include acquisition and management of new projects, supervision of master and Ph.D. thesis projects and lecturing. He acts as organizer and chairperson of numerous international conferences and as Reviewer in scientific Journals and for Institutions. In 2000 he received the Elsevier Award for best Scientific Presentation. He has more than 300 publications, 36 invited conference presentations, 79 contributed conference reports, 31 patents and over 1'000 citations totally.


  • Microfabrication Processes