This course has been developed to give attendees the background to perform Microsystem reliability characterization from the component to system levels. Initially, we present the fundamentals of mechanical, environmental, and reliability testing as applied to Microsystems. The focus begins with the characterization of single components and structures; these are illustrated with practical examples from industry. We apply these procedures to MEMS and Microsystem level reliability test applications. Test techniques, specifications, and methodology are presented in detail with examples from industry. Additionally, for courses taking place in Neuchatel, participants will see live demonstrations of typical testing techniques to enable them to apply these concepts to their own application area.

This course is designed for the practicing scientist or engineer to provide a foundation in surface mechanical properties characterisation and reliability testing of Microsystems and Micro-Electro Mechanical Systems (MEMS).

• Fundamentals of surface mechanical properties testing methods and application to both bulk and coated materials
• Basics of material mechanics, environmental and reliability testing
• Adhesion, residual stress, nanoindentation, nanoscratch, nano and micro-tribology
• Static and dynamic test methodology as applied to micron and nano-scale components and systems
• Reliability testing of layered materials, precision components, micron and sub-micron scale structures, contacts, and systems
• Methodology for defining and creating test specifications at the Micro-component and system levels
• Applications will be presented that include optical shutters, micro-switches, electrical contacts, accelerometers, fluid channels (Bio-MEMS), sliding interfaces, adhesive contacts, etc.