Formats de cours disponibles

cours en salle

Polymer Microfabrication (2 days)

Objectifs du cours

Besides silicon and the established MEMS/MOEMS technology polymer materials and the related microreplication technologies are becoming more and more important for the realization and commercial success of new microcomponents and microsystems. New nanostructuring methods like 2-photon-stereolithography and others are at the threshold of leaving the laboratory status and entering market.

The course will cover the large variety of polymer materials, their fundamental chemical and physical properties and the derived microstructuring and replication possibilities. Direct and indirect micro- and nanostructuring methods like deep X-ray lithography, stereolithography, laser machining, nanoimprinting and others as well as the large family of replication methods like hot embossing and injection molding will be described in detail. Master and tooling fabrication methods like electroplating, electro discharge machining as well as mechanical and laser micromachining will be presented and discussed intensely.

A large number of application examples and case studies dealing with the accessible geometries, feasibility, and process characteristics will be used for the presentation of the polymer microfabrication importance.

The course is given at two different dates:
In autumn, in a one day presentation, the course concentrates on the basics to give an overview about the technologies.
In spring, during the two day presentation, there is more space for specific details and discussion. A visit of related labs exhibiting the machinery completes this extended course.

Public cible

The course is designed for technical management, R&D engineers and production specialists who face challenges of product development, manufacturing technologies and high-volume applications.


  • Polymers: Fundamental chemical and physical properties
  • Fabrication of molding tools: Fabrication principles and characteristics
  • Rapid Prototyping in microsystem technology
  • Polymer replication techniques: Reaction Molding, UV-Embossing, Hot Embossing and Injection Molding: Principles, equipment, applications and case studies
  • From micro to nano: Nanoimprinting, soft lithography, nanostereolithography and other new developments

Informations et inscription

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2 days

Langue du cours



Thomas Hanemann

Mathias Heckele