MEMS - an enabling key technology

After attending this course, the participants will have a sound knowledge in current MEMS sensors and devices, their design and fabrication, well prepared to enter the commercial opportunities this field currently is offering.

MEMS (Micro-electro-mechanical systems) are undoubtedly an enabling key technology for the 21st century, as they can contribute to solutions for practically all grand societal challenges humanity is facing, such as sustainable growth, mobility, environmental problems, health and renewable energy. This fascinating and multidisciplinary research field will certainly strongly grow over the next years, and already represents an important economic factor. MEMS based technology currently has an estimated worldwide revenue of 20-25 billion USD and a forecast of 15-20% annual growth for the foreseeable future.

The short course will provide an introduction to MEMS sensors and devices. The first day will present some market forecasts and a general overview of the field. It then will focus on fabrication technologies on how to realize MEMS devices. The second day will mainly focus on applications of MEMS devices, their operation and future developments. MEMS devices that will be discussed will include physical sensors such as accelerometers, gyroscopes and pressure sensors, which now can be found in very smartphone, but also include inertial sensors for aerospace applications and oil & gas resource detection, resonant based sensors for bio-medical applications, sensors for autonomous vehicles (e.g. MEMS scanning mirrors for LIDARs), energy harvesters, chemical sensors for environmental monitoring and pressure sensors for medical and industrial applications.

The short course will also briefly review recent trends in industry and academia and highlight emerging technologies that are promising for future developments, such as coupled resonators, piezoelectric transducers and devices, as well as packaging, which is often an underestimated field.

Engineers from companies planning to enter or recently have entered the field of MEMS devices. Postgraduate university students planning to work on MEMS for their PhD or Master project.

• What is MEMS? (Where did MEMS come from? - Definitions of MEMS, Microsystem technology and Nanotechnology - Scaling laws- Some real world examples)

• Economic Status and Predictions of High Value MEMS (Current Market and their economic status - Market data for various MEMS devices and their applications - Main MEMS players)

• Technologies for MEMS Sensors and Devices (MEMS fabrication processes - Transduction technologies - Interface and control circuits

• Inertial Sensors (Accelerometers - Gyroscopes - Applications areas - Practical examples)

• MEMS Pressure Sensors (Principles of operation - Pressure sensors for automotive applications - Pressure Sensors for consumer applications - Pressure sensors for medical applications)

• Biomedical Sensors and Devices (Implantable sensors and devices)

• Biochemical Sensors and Devices (Electrochemical sensors - Environmental sensors based gravimetric principles)